Operation
There are two types of ICP geometries. They are: planar and cylindrical. In planar geometry, the electrode is a coil of flat metal wound like a spiral. In cylindrical geometry, it is like a helical spring.
When a time-varying electric current is passed through the coil, it creates a time-varying magnetic field around it, which in turn induces azimuthal electric currents in the rarefied gas, leading to the formation of a plasma. Argon is one example of a commonly-used rarefied gas.
Read more about this topic: Inductively Coupled Plasma
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