Vacuum Pump - Types

Types

Pumps can be broadly categorized according to three techniques:

• Positive displacement pumps use a mechanism to repeatedly expand a cavity, allow gases to flow in from the chamber, seal off the cavity, and exhaust it to the atmosphere.
• Momentum transfer pumps, also called molecular pumps, use high speed jets of dense fluid or high speed rotating blades to knock gas molecules out of the chamber.
• Entrapment pumps capture gases in a solid or adsorbed state. This includes cryopumps, getters, and ion pumps.

Positive displacement pumps are the most effective for low vacuums. Momentum transfer pumps in conjunction with one or two positive displacement pumps are the most common configuration used to achieve high vacuums. In this configuration the positive displacement pump serves two purposes. First it obtains a rough vacuum in the vessel being evacuated before the momentum transfer pump can be used to obtain the high vacuum, as momentum transfer pumps cannot start pumping at atmospheric pressures. Second the positive displacement pump backs up the momentum transfer pump by evacuating to low vacuum the accumulation of displaced molecules in the high vacuum pump. Entrapment pumps can be added to reach ultrahigh vacuums, but they require periodic regeneration of the surfaces that trap air molecules or ions. Due to this requirement their available operational time can be unacceptably short in low and high vacuums, thus limiting their use to ultrahigh vacuums. Pumps also differ in details like manufacturing tolerances, sealing material, pressure, flow, admission or no admission of oil vapor, service intervals, reliability, tolerance to dust, tolerance to chemicals, tolerance to liquids and vibration.