3D in SEM
3D data can be measured in the SEM with different methods such as:
- photogrammetry (2 or 3 images from tilted specimen)
- photometric stereo (use of 4 images from BSE detector)
- inverse reconstruction using electron-material interactive models
Possible applications are roughness measurement, measurement of fractal dimension, corrosion measurement and height step measurement.
Read more about this topic: Scanning Electron Microscope