Impact of Resolution: The k1 Factor
The conventional diffraction-limited resolution is given by the Rayleigh criterion as where is the numerical aperture and is the wavelength of the illumination source. It is often common to compare the critical feature width to this value, by defining a parameter, such that feature width equals Nested features with benefit less from OPC than isolated features of the same size. The reason is the spatial frequency spectrum of nested features contains fewer components than isolated features. As the feature pitch decreases, more components are truncated by the numerical aperture, resulting in greater difficulty to affect the pattern in the desired fashion.
Read more about this topic: Optical Proximity Correction
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