Materials For MEMS Manufacturing
The fabrication of MEMS evolved from the process technology in semiconductor device fabrication, i.e. the basic techniques are deposition of material layers, patterning by photolithography and etching to produce the required shapes.
Read more about this topic: Microelectromechanical Systems
Famous quotes containing the word materials:
“Realism to be effective must be a matter of selection. ... genius chooses its materials with a view to their beauty and effectiveness; mere talent copies what it thinks is nature, only to find it has been deceived by the external grossness of things.”
—Julia Marlowe (1866–1950)