Wavelength Determination
The wavelength of an excimer laser depends on the molecules used, and is usually in the ultraviolet:
| Excimer | Wavelength | Relative Power mW |
|---|---|---|
| Ar2* | 126 nm | |
| Kr2* | 146 nm | |
| Xe2* | 172 & 175 nm | |
| ArF | 193 nm | 60 |
| KrF | 248 nm | 100 |
| XeBr | 282 nm | |
| XeCl | 308 nm | 50 |
| XeF | 351 nm | 45 |
| KrCl | 222 nm | 25 |
Excimer lasers, such as XeF and KrF, can also be made slightly tunable using a variety of prism and grating intracavity arrangements.
Read more about this topic: Excimer Lasers