Accuracy of EDS
Accuracy of EDS spectrum can be affected by various factors. Many elements will have overlapping peaks (e.g., Ti Kβ and V Kα, Mn Kβ and Fe Kα). The accuracy of the spectrum can also be affected by the nature of the sample. X-rays can be generated by any atom in the sample that is sufficiently excited by the incoming beam. These X-rays are emitted in any direction, and so they may not all escape the sample. The likelihood of an X-ray escaping the specimen, and thus being available to detect and measure, depends on the energy of the X-ray and the amount and density of material it has to pass through. This can result in reduced accuracy in inhomogeneous and rough samples.
Read more about this topic: Energy-dispersive X-ray Spectroscopy
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