Diffraction Grating - Fabrication

Fabrication

Originally, high-resolution gratings were ruled using high-quality ruling engines whose construction was a large undertaking. Henry Joseph Grayson designed a machine to make diffraction gratings, succeeding with one of 120,000 lines to the inch (approx. 47 000 per cm) in 1899. Later, photolithographic techniques allowed gratings to be created from a holographic interference pattern. Holographic gratings have sinusoidal grooves and may not be as efficient as ruled gratings, but are often preferred in monochromators because they lead to much less stray light. A copying technique allows high quality replicas to be made from master gratings of either type, thereby lowering fabrication costs.

Another method for manufacturing diffraction gratings uses a photosensitive gel sandwiched between two substrates. A holographic interference pattern exposes the gel which is later developed. These gratings, called volume phase holography diffraction gratings (or VPH diffraction gratings) have no physical grooves, but instead a periodic modulation of the refractive index within the gel. This removes much of the surface scattering effects typically seen in other types of gratings. These gratings also tend to have higher efficiencies, and allow for the inclusion of complicated patterns into a single grating. In older versions of such gratings, environmental susceptibility was a trade-off, as the gel had to be contained at low temperature and humidity. Typically, the photosensitive substances are sealed between two substrates which make them resistant to humidity, thermal and mechanical stresses. VPH diffraction gratings are not destroyed by accidental touches and are more scratch resistant than typical relief gratings.

Semiconductor technology today is also utilized to etch holographically patterned gratings into robust materials such as fused silica. In this way, low stray-light holography is combined with the high efficiency of deep, etched transmission gratings, and can be incorporated into high volume, low cost semiconductor manufacturing technology.

A new technology for grating insertion into integrated photonic lightwave circuits is digital planar holography (DPH). DPH gratings are generated in computer and fabricated on one or several interfaces of an optical waveguide planar with standard micro-lithography or nano-imprinting methods, compatible with mass-production. Light propagates inside the DPH gratings, confined by the refractive index gradient, which provides longer interaction path and greater flexibility in light steering.