Example: Elpida 90 Nm DDR2 SDRAM Process
- Use of 300 mm wafer size
- Use of KrF (248 nm) lithography with optical proximity correction
- 512 Mbit
- 1.8 V operation
- Derivative of earlier 110 nm and 100 nm processes
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“Science is a dynamic undertaking directed to lowering the degree of the empiricism involved in solving problems; or, if you prefer, science is a process of fabricating a web of interconnected concepts and conceptual schemes arising from experiments and observations and fruitful of further experiments and observations.”
—James Conant (18931978)