Example: Fujitsu 65 Nm Process
- Gate length: 30 nm (high-performance) to 50 nm (low-power)
- Core voltage: 1.0 V
- 11 Cu interconnect layers using nano-clustering silica as ultralow k dielectric (k=2.25)
- Metal 1 pitch: 180 nm
- Nickel silicide source/drain
- Gate oxide thickness: 1.9 nm (n), 2.1 nm (p)
There are actually two versions of the process: CS200, focusing on high performance, and CS200A, focusing on low power.
Read more about this topic: 65 Nanometer
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